No nā optoelectronics i hoʻokumu ʻia i ka silicon, nā photodetectors silicon (photodetector Si)

No nā optoelectronics i hoʻokumu ʻia i ka silicon, nā photodetectors silicon

Nā mea nānā kiʻihoʻololi i nā hōʻailona kukui i mau hōʻailona uila, a i ka hoʻomau ʻana o ka hoʻomaikaʻi ʻana o nā wikiwiki hoʻoili ʻikepili, ua lilo nā photodetectors wikiwiki i hoʻohui ʻia me nā kahua optoelectronics e pili ana i ka silicon i mea nui i nā kikowaena ʻikepili hanauna hou a me nā pūnaewele kelepona. E hāʻawi kēia ʻatikala i kahi ʻike o nā photodetectors wikiwiki holomua, me ka hoʻoikaika ʻana i ka germanium e pili ana i ka silicon (Ge a i ʻole Si photodetector).nā mea ʻike kiʻi siliconno ka ʻenehana optoelectronics i hoʻohui ʻia.

He mea hoihoi ʻo Germanium no ka ʻike ʻana i ke kukui infrared kokoke ma nā kahua silicon no ka mea he kūpono ia me nā kaʻina hana CMOS a he ikaika loa ka omo ʻana ma nā nalu telecommunication. ʻO ka ʻōnaehana photodetector Ge/Si maʻamau ka pin diode, kahi i hoʻopaʻa ʻia ai ka germanium intrinsic ma waena o nā ʻāpana P-type a me N-type.

ʻO ke ʻano o ka hāmeʻa Hōʻike ka Kiʻi 1 i kahi pine kū pololei maʻamau ʻo Ge a i ʻoleMea ʻike kiʻi Siʻano:

ʻO nā hiʻohiʻona nui e komo pū ana me: ka papa omo germanium i ulu ʻia ma luna o ka substrate silicon; Hoʻohana ʻia e hōʻiliʻili i nā pilina p a me n o nā mea lawe ukana; ka hoʻopili ʻana o Waveguide no ka omo ʻana o ka mālamalama maikaʻi.

ʻO ka ulu ʻana o ka epitaxial: He mea paʻakikī ka ulu ʻana o ka germanium kiʻekiʻe ma luna o ka silicon ma muli o ka 4.2% lattice mismatch ma waena o nā mea ʻelua. Hoʻohana pinepine ʻia kahi kaʻina hana ulu ʻelua-ʻanuʻu: ka ulu ʻana o ka papa buffer haʻahaʻa (300-400°C) a me ka waiho ʻana o ka germanium i ka mahana kiʻekiʻe (ma luna o 600°C). Kōkua kēia ʻano hana i ka hoʻomalu ʻana i nā dislocations threading i hoʻokumu ʻia e nā mismatches lattice. ʻO ka annealing ma hope o ka ulu ʻana ma 800-900°C e hoʻemi hou aku i ka nui o ka dislocation threading i kahi o 10^7 cm^-2. Nā ʻano hana: Hiki i ka photodetector Ge/Si PIN holomua loa ke hoʻokō: pane ʻana, > 0.8A /W ma 1550 nm; Bandwidth,>60 GHz; Au pōʻeleʻele, <1 μA ma -1 V bias.

Hoʻohui ʻia me nā kahua optoelectronics e pili ana i ka silicon

ʻO ka hoʻohui ʻana onā mea ʻike kiʻi wikiwikime nā kahua optoelectronics i hoʻokumu ʻia i ka silicon e hiki ai i nā transceivers optical holomua a me nā interconnects. ʻO nā ʻano hoʻohui nui ʻelua penei: Hoʻohui mua-hope (FEOL), kahi e hana like ʻia ai ka photodetector a me ka transistor ma kahi substrate silicon e ʻae ana i ka hana wela kiʻekiʻe, akā e lawe ana i ka ʻāpana chip. Hoʻohui hope-hope (BEOL). Hana ʻia nā photodetectors ma luna o ka metala e pale aku i ka hoʻopilikia ʻana me CMOS, akā ua kaupalena ʻia i nā mahana hana haʻahaʻa.

Kiʻi 2: Pane a me ka bandwidth o kahi mea ʻike kiʻi Ge/Si wikiwiki

Polokalamu kikowaena ʻikepili

ʻO nā mea ʻike kiʻi wikiwiki he ʻāpana koʻikoʻi i ka hanauna hou o ka pilina kikowaena ʻikepili. ʻO nā noi nui e pili ana i: nā transceivers optical: 100G, 400G a me nā helu kiʻekiʻe, me ka hoʻohana ʻana i ka modulation PAM-4; Amea ʻike kiʻi bandwidth kiʻekiʻe(>50 GHz) e pono ai.

Kaapuni hoʻohui optoelectronic i hoʻokumu ʻia ma Silicon: hoʻohui monolithic o ka mea ʻike me ka modulator a me nā ʻāpana ʻē aʻe; He ʻenekini optical compact a hana kiʻekiʻe.

Hoʻolālā hoʻolaha: ka pilina optical ma waena o ka helu ʻana i hoʻolaha ʻia, ka mālama ʻana, a me ka mālama ʻana; Ke hoʻokele nei i ke koi no nā photodetectors bandwidth kiʻekiʻe a mālama pono i ka ikehu.

Nānā i ka wā e hiki mai ana

E hōʻike ana ka wā e hiki mai ana o nā photodetectors wikiwiki kiʻekiʻe optoelectronic i hoʻohui ʻia i nā ʻano hou:

Nā wikiwiki ʻikepili kiʻekiʻe: Ke hoʻoulu nei i ka hoʻomohala ʻana o nā transceivers 800G a me 1.6T; Pono nā photodetectors me nā bandwidths ʻoi aku ma mua o 100 GHz.

Hoʻohui maikaʻi ʻia: Hoʻohui ʻāpana hoʻokahi o ka mea III-V a me ka silicon; ʻEnehana hoʻohui 3D holomua.

Nā mea hou: Ke ʻimi nei i nā mea ʻelua-dimensional (e like me graphene) no ka ʻike ʻana i ka mālamalama wikiwiki loa; He hui IV hou no ka uhi ʻana i ka nalu lōʻihi.

Nā noi e kū mai ana: Ke hoʻokele nei ʻo LiDAR a me nā noi ʻike ʻē aʻe i ka hoʻomohala ʻana o APD; Nā noi photon microwave e koi ana i nā photodetectors linearity kiʻekiʻe.

Ua lilo nā mea ʻike kiʻi wikiwiki, ʻoiai nā mea ʻike kiʻi Ge a i ʻole Si, i mea hoʻokele nui o ka optoelectronics e pili ana i ka silicon a me nā kamaʻilio optical hanauna e hiki mai ana. He mea nui ka holomua mau ʻana i nā mea hana, ka hoʻolālā hāmeʻa, a me nā ʻenehana hoʻohui e hoʻokō i nā koi bandwidth e ulu nei o nā kikowaena ʻikepili e hiki mai ana a me nā pūnaewele kelepona. Ke hoʻomau nei ka ulu ʻana o ke kahua, hiki iā mākou ke manaʻo e ʻike i nā mea ʻike kiʻi me ka bandwidth kiʻekiʻe, ka walaʻau haʻahaʻa, a me ka hoʻohui maʻalahi me nā kaapuni uila a me nā photonic.