No nā optoelectronics ma muli o ke silika, nā mea nānā kiʻi kiʻi
Nā mea nānā kiʻie hoʻololi i nā hōʻailona māmā i nā hōʻailona uila, a i ka hoʻomau ʻana o ka hoʻololi ʻana o ka ʻikepili, ua lilo nā photodetectors kiʻekiʻe i hoʻohui ʻia me nā kahua optoelectronics ma muli o ke silika i nā kikowaena ʻikepili a me nā pūnaewele kelepona. E hāʻawi kēia ʻatikala i kahi hiʻohiʻona o nā kiʻi kiʻi kiʻekiʻe kiʻekiʻe kiʻekiʻe, me ka manaʻo nui i ka germanium hoʻokumu ʻia ke silika (Ge a i ʻole Si photodetector)kiʻi kiʻi kiʻi kiʻino ka ʻenehana optoelectronics i hoʻohui ʻia.
He mea uʻi ka Germanium no ka ʻike ʻana i nā kukui infrared kokoke i nā paepae silika no ka mea kūpono ia me nā kaʻina CMOS a he ikaika loa ka absorption ma nā hawewe kelepona. ʻO ka ʻōnaehana photodetector Ge/Si maʻamau ka pine diode, kahi i hoʻopili ʻia ai ka germanium intrinsic ma waena o nā ʻano P-type a me N-type.
Hōʻike ʻia ke kiʻi 1 i kahi pine kū maʻamau ʻo Ge a i ʻoleʻO ka mea nānā kiʻihale:
ʻO nā hiʻohiʻona nui he: germanium absorbing layer i ulu ʻia ma luna o ka substrate silika; Hoʻohana ʻia e hōʻiliʻili i nā p a me n pili o nā mea lawe uku; ʻO ka hui alakaʻi nalu no ka hoʻopili māmā ʻana.
Ka ulu ʻana o Epitaxial: He paʻakikī ka ulu ʻana i ka germanium kiʻekiʻe ma ke silika ma muli o ka 4.2% lattice mismatch ma waena o nā mea ʻelua. Hoʻohana mau ʻia kahi kaʻina hana ulu ʻelua: haʻahaʻa haʻahaʻa (300-400°C) ka ulu ʻana o ka papa pale a me ka wela kiʻekiʻe (ma luna o 600°C) deposition o germanium. Kōkua kēia ʻano hana i ka hoʻopaʻa ʻana i nā dislocations threading i hana ʻia e ka lattice mismatches. ʻO ka hoʻopili ʻana ma hope o ka ulu ʻana ma 800-900 ° C e hōʻemi hou i ka nui o ka dislocation o ka threading ma kahi o 10^7 cm^-2. Nā hiʻohiʻona hana: ʻO ka mea kiʻi kiʻi kiʻi Ge / Si PIN kiʻekiʻe hiki ke hoʻokō: pane, > 0.8A / W ma 1550 nm; Alanui,> 60 GHz; ʻĀnō ʻeleʻele, <1 μA ma -1 V bias.
Hoʻohui pū me nā kahua optoelectronics ma muli o ke silika
ʻO ka hoʻohui ʻana okiʻi kiʻi kiʻi wikiwikime nā paepae optoelectronics e pili ana i ka silicon e hiki ai i nā transceivers optical kiʻekiʻe a me nā pilina. ʻO nā ʻano hana hoʻohui nui ʻelua e like me kēia: Front-end integration (FEOL), kahi i hana ʻia ai ka photodetector a me ka transistor i ka manawa hoʻokahi ma kahi substrate silicon e ʻae ai i ka hana wela kiʻekiʻe, akā lawe i kahi wahi chip. Hoʻohui hope-hope (BEOL). Hana ʻia nā photodetectors ma luna o ka metala e pale aku i ka hoʻopilikia ʻana me CMOS, akā ua kaupalena ʻia i ka haʻahaʻa haʻahaʻa.
Kiʻi 2: Ka pane a me ka bandwidth o kahi kiʻi kiʻi Ge / Si kiʻekiʻe
Ke noi kikowaena ʻikepili
ʻO nā photodetectors kiʻekiʻe ka māmā he mea nui i ka hanauna e hiki mai ana o ka pilina kikowaena data. ʻO nā noi nui: nā transceivers optical: 100G, 400G a me nā helu kiʻekiʻe, me ka hoʻohana ʻana i ka modulation PAM-4; Akiʻi kiʻi bandwidth kiʻekiʻe(>50 GHz) pono.
Silicon-based optoelectronic integrated circuit: monolithic integration of detector with modulator and other parts; ʻO ka ʻenekini ʻenehana paʻakikī, hana kiʻekiʻe.
ʻO ka hoʻolālā hoʻolaha: ka pilina opua ma waena o ka hoʻopili helu ʻana, mālama, a me ka waiho ʻana; Ke alakaʻi nei i ke koi no ka ikehu-efficient, high-bandwidth photodetectors.
Nānā i ka wā e hiki mai ana
ʻO ka wā e hiki mai ana o nā photodetectors kiʻekiʻe optoelectronic i hoʻohui ʻia e hōʻike i kēia mau ʻano:
ʻO nā heluʻikepili kiʻekiʻe: Ke alakaʻi nei i ka hoʻomohala ʻana o 800G a me 1.6T transceivers; Pono nā mea nānā kiʻi me nā bandwidth ʻoi aku ma mua o 100 GHz.
Hoʻohui maikaʻi ʻia: Hoʻohui pū ʻia hoʻokahi pahu o III-V mea a me ke silika; ʻenehana hoʻohui 3D kiʻekiʻe.
Nā mea hou: Ke ʻimi nei i nā mea ʻelua-dimensional (e like me ka graphene) no ka ʻike kukui ultrafast; He hui hui IV hou no ka uhi ʻana i ka lōʻihi nalu.
Nā noi e puka mai ana: Ke alakaʻi nei ka LiDAR a me nā noi ʻike ʻē aʻe i ka hoʻomohala ʻana o APD; ʻO nā noi kiʻi kiʻi microwave e koi ana i nā kiʻi kiʻi laina kiʻekiʻe.
ʻO nā kiʻi kiʻi kiʻekiʻe kiʻekiʻe, ʻoi aku ka Ge a i ʻole Si photodetectors, ua lilo i mea hoʻokele koʻikoʻi o nā optoelectronics e pili ana i ke kilika a me nā kamaʻilio optical hanauna e hiki mai ana. ʻO ka hoʻomau ʻana i ka holomua o nā mea waiwai, ka hoʻolālā ʻana i nā mea hana, a me nā ʻenehana hoʻohui ʻia he mea nui e hoʻokō i nā koi bandwidth e ulu nei o nā kikowaena ʻikepili a me nā pūnaewele kelepona. Ke hoʻomau nei ka ulu ʻana o ka māla, hiki iā mākou ke manaʻo e ʻike i nā photodetectors me ka bandwidth kiʻekiʻe, haʻahaʻa haʻahaʻa, a me ka hoʻohui ʻole ʻana me nā kaʻa uila a me nā kiʻi kiʻi.
Ka manawa hoʻouna: Jan-20-2025