Mea hoʻoikaika kino kiʻi Silicon

Mea hoʻoikaika kino kiʻi Silicon

ʻO nā mea hoʻohana Photonics e pili pono ana i nā pilina ikaika i hana ʻia ma waena o ka māmā a me ka mea. ʻO kahi mea hana maʻamau o nā photonics he modulator optical. ʻO nā mea a pau i hoʻokumu ʻia i ka silikanā mea hoʻololi opuaua hoʻokumu ʻia ma ka hopena plasma free carrier. ʻO ka hoʻololi ʻana i ka helu o nā electrons manuahi a me nā lua i loko o kahi mea silika ma o ka doping, nā uila a i ʻole nā ​​​​mea hana optical hiki ke hoʻololi i kāna helu helu refractive paʻakikī, kahi kaʻina i hōʻike ʻia i nā hoohalike (1,2) i loaʻa ma ka hoʻopili ʻana i ka ʻikepili mai Soref a me Bennett ma kahi hawewe o 1550 nanometers. . Ke hoʻohālikelike ʻia me nā electrons, hoʻonui nā puka i ka hapa nui o ka hoʻololi ʻana i ka helu kuhikuhi refractive maoli a me ka noʻonoʻo, ʻo ia hoʻi, hiki iā lākou ke hana i kahi hoʻololi ʻoi aku ka nui no ka hoʻololi i hāʻawi ʻia, no laila maMach-Zehnder modulatorsa me nā modulator ring, ʻoi aku ka maikaʻi o ka hoʻohana ʻana i nā lua e hana ainā mea modulators.

ʻO nā ʻano like ʻolesilikoni (Si) modulatorhōʻike ʻia nā ʻano ʻano ma ke Kiʻi 10A. I loko o kahi modulator injection injection, aia ke kukui i loko o ka silicon intrinsic i loko o kahi hui pine ākea loa, a hoʻokomo ʻia nā electrons a me nā puka. Eia nō naʻe, ʻoi aku ka lohi o ia mau modulators, maʻamau me ka bandwidth o 500 MHz, no ka mea, ʻoi aku ka lōʻihi o nā electrons manuahi a me nā lua e hui hou ma hope o ka injection. No laila, hoʻohana pinepine ʻia kēia ʻano e like me kahi attenuator optical variable (VOA) ma mua o ka modulator. I loko o kahi modulator hoʻopau lawe, aia ka ʻāpana māmā i kahi hui pn haiki, a ua hoʻololi ʻia ka laula hoʻopau o ka hui pn e kahi māla uila i hoʻohana ʻia. Hiki i kēia modulator ke hana i ka wikiwiki ma mua o 50Gb/s, akā loaʻa kahi poho hoʻokomo kiʻekiʻe. ʻO ka vpil maʻamau he 2 V-cm. ʻO ka mea hoʻopololei metala oxide semiconductor (MOS) (ʻoiaʻiʻo semiconductor-oxide-semiconductor) modulator i loaʻa i kahi ʻāpana oxide lahilahi ma kahi hui pn. Hāʻawi ia i kahi hōʻiliʻili o nā mea lawe a me ka hoʻopau ʻana o ka mea lawe, e ʻae ana i kahi VπL liʻiliʻi ma kahi o 0.2 V-cm, akā loaʻa ka hemahema o nā poho ʻoi aku ka kiʻekiʻe a me ka capacitance kiʻekiʻe i kēlā me kēia lōʻihi. Eia kekahi, aia nā SiGe uila absorption modulators e pili ana i ka SiGe (silicon Germanium alloy) band edge movement. Eia kekahi, aia nā graphene modulators e hilinaʻi nei i ka graphene e hoʻololi i waena o nā metala hoʻoheheʻe a me nā insulators māmā. Hōʻike kēia mau mea i ka ʻokoʻa o nā noi o nā ʻano hana like ʻole e hoʻokō ai i ka modulation hōʻailona optical kiʻekiʻe.

Kiʻi 10: (A) Ke kiʻi kiʻi keʻa o nā hoʻolālā modulator optical ma muli o ke silika a me (B) ke kiʻikuʻi cross-sectional o nā hoʻolālā ʻike maka.

Hōʻike ʻia kekahi mau mea ʻike kukui ma muli o ke kilika ma ke Kiʻi 10B. ʻO ka mea hoʻomoe he germanium (Ge). Hiki iā Ge ke komo i ka māmā ma nā nalu nalu a hiki i ka 1.6 microns. Hōʻike ʻia ma ka ʻaoʻao hema ka hoʻolālā ʻoihana kūleʻa loa i kēia lā. Hoʻokumu ʻia ia me ka silika doped ʻano P kahi e ulu ai ʻo Ge. Loaʻa iā Ge a me Si kahi 4% lattice mismatch, a i mea e hōʻemi ai i ka dislocation, ua ulu mua kahi ʻāpana lahilahi o SiGe ma ke ʻano he papa pale. Hana ʻia ka doping N-type ma luna o ka papa Ge. Hōʻike ʻia kahi photodiode metala-semiconductor-metal (MSM) ma ka waena, a me kahi APD (Avalanche Photodetector) hōʻike ʻia ma ka ʻākau. Aia ka ʻāpana avalanche ma APD ma Si, nona nā hiʻohiʻona haʻahaʻa haʻahaʻa i hoʻohālikelike ʻia me ka ʻāina avalanche ma nā mea kumu o ka hui III-V.

I kēia manawa, ʻaʻohe hopena me nā pōmaikaʻi ʻike i ka hoʻohui ʻana i ka waiwai optical me nā kiʻi kiʻi silika. Hōʻike ka helu 11 i kekahi mau koho i hoʻonohonoho ʻia e ka pae hui. Aia ma ka ʻaoʻao hema he mau monolithic integrations e komo pū ana me ka hoʻohana ʻana i ka germanium epitaxially grown (Ge) ma ke ʻano he mea waiwai waiwai, erbium-doped (Er) nā alakaʻi nalu aniani (e like me Al2O3, e koi ana i ka hoʻoheheʻe optical), a me ka epitaxially grown gallium arsenide (GaAs). ) nā kiko kiko. ʻO ke kolamu aʻe he hui wafer i ka wafer, e pili ana i ka oxide a me ka hoʻopaʻa ʻana i ka hui III-V. ʻO ke kolamu aʻe, ʻo ia ka hui chip-to-wafer, e pili ana i ka hoʻokomo ʻana i ka puʻupuʻu hui III-V i loko o ka lua o ka wafer silika a laila e hoʻoheheʻe ʻia i ke ʻano alakaʻi nalu. ʻO ka pōmaikaʻi o kēia ʻano kolamu mua ʻekolu, ʻo ia ka hiki ke hoʻāʻo piha ʻia ka mea hana i loko o ka wafer ma mua o ka ʻoki ʻana. ʻO ke kolamu ʻākau ʻo ia ka hui chip-to-chip, me ka hoʻopili pololei ʻana i nā ʻāpana silika i nā ʻāpana hui III-V, a me ka hoʻopili ʻana ma o nā lens a me nā mea hoʻohui. Ke neʻe nei ke ʻano o nā noi pāʻoihana mai ka ʻaoʻao ʻākau a i ka ʻaoʻao hema o ka pakuhi i nā hoʻonā i hoʻohui ʻia.

Kiʻi 11: Pehea e hoʻohui ʻia ai ka loaʻa optical i loko o nā kiʻi kiʻi kiʻi kiʻi. Ke neʻe nei ʻoe mai ka hema a i ka ʻākau, neʻe mālie ke kiko hoʻokomo hana i ke kaʻina hana.