ʻO ke ʻano o ka mea ʻike kiʻi InGaAs

ʻO ke ʻano oMea ʻike kiʻi InGaAs
Mai ka makahiki 1980, ua aʻo nā kānaka noiʻi i ke ʻano o nā photodetectors InGaAs, hiki ke hōʻuluʻulu ʻia i ʻekolu mau ʻano nui: metala InGaAs metala semiconductornā mea nānā kiʻi(MSM-PD), InGaAsNā mea ʻike kiʻi PIN(PIN-PD), a me InGaAsnā mea ʻike kiʻi avalanche(APD-PD). Aia nā ʻokoʻa koʻikoʻi i ke kaʻina hana a me ke kumukūʻai o nā mea ʻike kiʻi InGaAs me nā ʻano like ʻole, a aia kekahi mau ʻokoʻa koʻikoʻi i ka hana o ka hāmeʻa.
Ua hōʻike ʻia ke kiʻikuhi schematic o ka hoʻonohonoho ʻana o ka photodetector metala semiconductor InGaAs ma ke kiʻi, he ʻano kūikawā ia e pili ana i ka Schottky junction. I ka makahiki 1992, ua hoʻohana ʻo Shi et al. i ka ʻenehana low-pressure metal organic vapor phase epitaxy (LP-MOVPE) e ulu i nā papa epitaxial a hoʻomākaukau i nā photodetectors InGaAs MSM. Loaʻa i ka hāmeʻa kahi pane kiʻekiʻe o 0.42 A/W ma kahi nalu o 1.3 μ m a me ke au ʻeleʻele ma lalo o 5.6 pA/μ m² ma 1.5 V. I ka makahiki 1996, ua hoʻohana nā mea noiʻi i ka gas-phase molecular beam epitaxy (GSMBE) e ulu i nā papa epitaxial InAlAs InGaAs InP, kahi i hōʻike i nā ʻano resistivity kiʻekiʻe. Ua hoʻomaikaʻi ʻia nā kūlana ulu ma o nā ana diffraction X-ray, e hopena ana i kahi mismatch lattice ma waena o nā papa InGaAs a me InAlAs i loko o ka pae o 1 × 10 ⁻ ³. ʻO ka hopena, ua hoʻomaikaʻi ʻia ka hana o ka hāmeʻa, me ke au pouli ma lalo o 0.75 pA/μ m² ma 10 V a me ka pane wikiwiki o 16 ps ma 5 V. Ma keʻano holoʻokoʻa, he ʻano maʻalahi a maʻalahi hoʻi ka hoʻohui ʻana o ka photodetector ʻano MSM, e hōʻike ana i ke au pouli haʻahaʻa (pae pA), akā hoʻemi ka electrode metala i ka wahi omo mālamalama kūpono o ka hāmeʻa, e hopena ana i ka pane haʻahaʻa i hoʻohālikelike ʻia me nā ʻano ʻē aʻe.

Loaʻa i ka photodetector PIN InGaAs kahi papa kūloko i hoʻokomo ʻia ma waena o ka papa hoʻopili ʻano P a me ka papa hoʻopili ʻano N, e like me ka mea i hōʻike ʻia ma ke kiʻi, kahi e hoʻonui ai i ka laulā o ka ʻāpana depletion, no laila e hoʻomālamalama ana i nā hui lua electron hou aʻe a hana i kahi photocurrent nui aʻe, no laila e hōʻike ana i ka conductivity uila maikaʻi loa. I ka makahiki 2007, ua hoʻohana nā kānaka noiʻi iā MBE e ulu i nā papa buffer haʻahaʻa haʻahaʻa, e hoʻomaikaʻi ana i ka ʻili o ka ʻili a lanakila i ka mismatch lattice ma waena o Si a me InP. Ua hoʻohui lākou i nā ʻano PIN InGaAs ma nā substrates InP me ka hoʻohana ʻana iā MOCVD, a ʻo ka pane o ka hāmeʻa ma kahi o 0.57 A/W. I ka makahiki 2011, ua hoʻohana nā kānaka noiʻi i nā photodetectors PIN e hoʻomohala i kahi mea kiʻi LiDAR pōkole no ka hoʻokele, ka pale ʻana i nā pilikia/kuʻi, a me ka ʻike ʻana/ʻike ʻana i nā pahuhopu o nā kaʻa honua liʻiliʻi unmanned. Ua hoʻohui ʻia ka hāmeʻa me kahi chip amplifier microwave haʻahaʻa ke kumu kūʻai, e hoʻomaikaʻi nui ana i ka ratio signal-to-noise o nā photodetectors PIN InGaAs. Ma kēia kumu, i ka makahiki 2012, ua hoʻopili nā mea noiʻi i kēia mea hana kiʻi LiDAR i nā robots, me kahi laulā ʻike ma mua o 50 mika a ua hoʻonui ʻia ka hoʻonā i 256 × 128.
ʻO ka photodetector avalanche InGaAs kahi ʻano photodetector me ka loaʻa, e like me ka mea i hōʻike ʻia ma ke kiʻikuhi hoʻonohonoho. Loaʻa i nā hui lua electron ka ikehu lawa ma lalo o ka hana o ke kahua uila i loko o ka ʻāpana pālua, a kuʻi me nā ʻātoma e hana i nā hui lua electron hou, e hana ana i ka hopena avalanche a pāpālua i nā mea lawe uku ʻole i loko o ka mea. I ka makahiki 2013, ua hoʻohana nā kānaka noiʻi iā MBE e ulu i nā mea hoʻohuihui InGaAs a me InAlAs ma nā substrates InP, e hoʻololi ana i ka ikehu mea lawe ma o nā loli i ka haku mele alloy, ka mānoanoa o ka papa epitaxial, a me ka doping, e hoʻonui ana i ka ionization electroshock me ka hoʻemi ʻana i ka ionization lua. Ma lalo o ka loaʻa hōʻailona hopena like, hōʻike ʻo APD i ka walaʻau haʻahaʻa a me ke au pouli haʻahaʻa. I ka makahiki 2016, ua kūkulu nā kānaka noiʻi i kahi kahua hoʻokolohua kiʻi laser active 1570 nm e pili ana i nā photodetectors avalanche InGaAs. ʻO ke kaapuni kūloko o kaMea ʻike kiʻi APDi loaʻa nā leo kani a hoʻopuka pololei i nā hōʻailona kikohoʻe, e hoʻolilo ana i ka hāmeʻa holoʻokoʻa i paʻa. Hōʻike ʻia nā hopena hoʻokolohua ma nā Kiʻi (d) a me (e). ʻO ke Kiʻi (d) he kiʻi kino o ka pahuhopu kiʻi, a ʻo ke Kiʻi (e) he kiʻi mamao ʻekolu-dimensional. Hiki ke ʻike maopopo ʻia he mamao hohonu ko ka ʻāpana puka makani ma ka Zone C mai nā Zone A a me B. Loaʻa i kēia kahua kahi laulā pulse ma lalo o 10 ns, ka ikehu pulse hoʻokahi hiki ke hoʻololi ʻia (1-3) mJ, kahi kihi ʻike o 2 ° no nā aniani hoʻouna a me ka loaʻa ʻana, kahi helu hana hou o 1 kHz, a me kahi pōʻaiapuni hana detector ma kahi o 60%. Mahalo i ka loaʻa ʻana o ke kahe kiʻi kūloko, ka pane wikiwiki, ka nui paʻa, ka lōʻihi, a me ke kumukūʻai haʻahaʻa o APD, hiki i nā photodetectors APD ke hoʻokō i kahi helu ʻike i hoʻokahi kauoha o ka nui ma mua o nā photodetectors PIN. No laila, i kēia manawa, hoʻohana nui ka radar laser mainstream i nā photodetectors avalanche.